Flip-chip joined 8X8 array of bottom - emitting 850 nm light-emitting diodes for interconnect applications

P. Heremans, P. Merken, J. Genoe, R. Windisch, C. Van Hoof, G. Borghs

Onderzoeksoutput: Bijdrage aan een tijdschriftCongresartikelpeer review

Samenvatting

We present an array of GaAs-based light-emitting diodes emitting at 850 nm, which is designed to be flip-chip joined on carriers like a silicon CMOS circuit. The light-emitting diodes are grown by MBE. After processing of the array and flip-chip joining using Indium-bumps, the substrate of the LED array is removed completely. Individual light-emitting diodes reach an external quantum efficiency of 3.3% after the complete process.

Originele taal-2Engels
Pagina's (van-tot)10-15
Aantal pagina's6
TijdschriftProceedings of SPIE - The International Society for Optical Engineering
Volume3288
DOI's
StatusGepubliceerd - 1998
EvenementOptoelectronic Interconnects V - San Jose, CA, Verenigde Staten van Amerika
Duur: 28 jan. 199829 jan. 1998

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