TY - JOUR
T1 - First studies of local ion fluxes in radio frequency plasmas for ion cyclotron wall conditioning applications in the TOMAS device
AU - Goriaev, A.
AU - Crombé, K.
AU - López-Rodríguez, D.
AU - Möller, S.
AU - Buermans, J.
AU - Verstraeten, M.
AU - Bradwil, D. Castaño
AU - Dittrich, L.
AU - Petersson, P.
AU - Kovtun, Yu
N1 - Publisher Copyright:
© 2023 Author(s).
PY - 2023/8/18
Y1 - 2023/8/18
N2 - To measure the local ion energy distribution functions for support of Ion Cyclotron Wall Conditioning (ICWC) application studies in the TOMAS device, a Semion Retarding Field Energy Analyzer (RFEA) by Impedans Ltd. has been installed in the sample load-lock system. The RFEA system has been commissioned in hydrogen Radio-Frequency (RF) plasmas. The first studies have been performed on the influence of the neutral hydrogen pressure, the input power, the magnetic field and the location on the average ion energy and ion flux density.
AB - To measure the local ion energy distribution functions for support of Ion Cyclotron Wall Conditioning (ICWC) application studies in the TOMAS device, a Semion Retarding Field Energy Analyzer (RFEA) by Impedans Ltd. has been installed in the sample load-lock system. The RFEA system has been commissioned in hydrogen Radio-Frequency (RF) plasmas. The first studies have been performed on the influence of the neutral hydrogen pressure, the input power, the magnetic field and the location on the average ion energy and ion flux density.
UR - http://www.scopus.com/inward/record.url?scp=85177038002&partnerID=8YFLogxK
U2 - 10.1063/5.0164706
DO - 10.1063/5.0164706
M3 - Conference article
AN - SCOPUS:85177038002
SN - 0094-243X
VL - 2984
JO - AIP Conference Proceedings
JF - AIP Conference Proceedings
IS - 1
M1 - 040007
T2 - 24th Topical Conference on Radio-frequency Power in Plasmas
Y2 - 26 September 2022 through 28 September 2022
ER -