Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs

Vladimir N. Leonov; Ybe Creten; Piet De Moor; Bert Du Bois; Claus Goessens; Bob Grietens; Patrick Merken; Natalia A. Perova; Gerlinde Ruttens; Chris Van Hoof; Agnes Verbist; Jan Vermeiren

doi:10.1117/12.487084

Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs

Vladimir N. Leonov
, Ybe Creten
, Piet De Moor
, Bert Du Bois
, Claus Goessens
, Bob Grietens
, Patrick Merken
, Natalia A. Perova
, Gerlinde Ruttens
, Chris Van Hoof
, Agnes Verbist
, Jan Vermeiren

Communication, Information, Systems and Sensors

Interuniversitair Micro-Electronica Centrum vzw
Xenics NV

Résultats de recherche: Contribution à un journal › Article de conférence › Revue par des pairs

14 Citations (Scopus)

Résumé

The state-of-the-art characteristics of polycrystalline SiGe microbolometer arrays are reported. An NETD of 100 mK at a time constant of 25 ms is achievable on 14×14 and 200×1 arrays at the system level. It is the result of joint studies targeted at 1/f noise decrease, as well as TCR and uniformity improvements together with the design optimization. Thanks to successful decrease of 1/f noise of SiGe, the arrays were moved from "1/f-noise limited" to "system limited", i.e. to the case of VO_x arrays. The mechanical design of pixels was improved affording very precise tuning of the infrared quarter-wave resonant cavity. The resistance and TCR non-uniformity with σ/μ better than 0.2% combined with about 1% noise nonuniformity and 100% pixel operability are demonstrated. The first lots of arrays with 99.98% production pixel yield have already been characterized and the results are being reported.

langue originale	Anglais
Pages (de - à)	446-457
Nombre de pages	12
journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5074
Les DOIs	https://doi.org/10.1117/12.487084
état	Publié - 2003
Evénement	Infrared Technology and Applications XXIX - Orlando, FL, États-Unis Durée: 21 avr. 2003 → 25 avr. 2003

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Leonov, V. N., Creten, Y., De Moor, P., Du Bois, B., Goessens, C., Grietens, B., Merken, P., Perova, N. A., Ruttens, G., Van Hoof, C., Verbist, A., & Vermeiren, J. (2003). Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs. Proceedings of SPIE - The International Society for Optical Engineering, 5074, 446-457. https://doi.org/10.1117/12.487084

@article{f5fa7dc226394798a0724049b45a8731,

title = "Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs",

abstract = "The state-of-the-art characteristics of polycrystalline SiGe microbolometer arrays are reported. An NETD of 100 mK at a time constant of 25 ms is achievable on 14×14 and 200×1 arrays at the system level. It is the result of joint studies targeted at 1/f noise decrease, as well as TCR and uniformity improvements together with the design optimization. Thanks to successful decrease of 1/f noise of SiGe, the arrays were moved from {"}1/f-noise limited{"} to {"}system limited{"}, i.e. to the case of VOx arrays. The mechanical design of pixels was improved affording very precise tuning of the infrared quarter-wave resonant cavity. The resistance and TCR non-uniformity with σ/μ better than 0.2\% combined with about 1\% noise nonuniformity and 100\% pixel operability are demonstrated. The first lots of arrays with 99.98\% production pixel yield have already been characterized and the results are being reported.",

keywords = "Infrared, Linear array, Microbolometer, Poly-SiGe, Readout, Small focal plane array, Thermal detector, Thermal imaging, Uncooled",

author = "Leonov, \{Vladimir N.\} and Ybe Creten and \{De Moor\}, Piet and \{Du Bois\}, Bert and Claus Goessens and Bob Grietens and Patrick Merken and Perova, \{Natalia A.\} and Gerlinde Ruttens and \{Van Hoof\}, Chris and Agnes Verbist and Jan Vermeiren",

year = "2003",

doi = "10.1117/12.487084",

language = "English",

volume = "5074",

pages = "446--457",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

note = "Infrared Technology and Applications XXIX ; Conference date: 21-04-2003 Through 25-04-2003",

}

Leonov, VN, Creten, Y, De Moor, P, Du Bois, B, Goessens, C, Grietens, B, Merken, P, Perova, NA, Ruttens, G, Van Hoof, C, Verbist, A & Vermeiren, J 2003, 'Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs', Proceedings of SPIE - The International Society for Optical Engineering, VOL. 5074, p. 446-457. https://doi.org/10.1117/12.487084

TY - JOUR

T1 - Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs

AU - Leonov, Vladimir N.

AU - Creten, Ybe

AU - De Moor, Piet

AU - Du Bois, Bert

AU - Goessens, Claus

AU - Grietens, Bob

AU - Merken, Patrick

AU - Perova, Natalia A.

AU - Ruttens, Gerlinde

AU - Van Hoof, Chris

AU - Verbist, Agnes

AU - Vermeiren, Jan

PY - 2003

Y1 - 2003

N2 - The state-of-the-art characteristics of polycrystalline SiGe microbolometer arrays are reported. An NETD of 100 mK at a time constant of 25 ms is achievable on 14×14 and 200×1 arrays at the system level. It is the result of joint studies targeted at 1/f noise decrease, as well as TCR and uniformity improvements together with the design optimization. Thanks to successful decrease of 1/f noise of SiGe, the arrays were moved from "1/f-noise limited" to "system limited", i.e. to the case of VOx arrays. The mechanical design of pixels was improved affording very precise tuning of the infrared quarter-wave resonant cavity. The resistance and TCR non-uniformity with σ/μ better than 0.2% combined with about 1% noise nonuniformity and 100% pixel operability are demonstrated. The first lots of arrays with 99.98% production pixel yield have already been characterized and the results are being reported.

AB - The state-of-the-art characteristics of polycrystalline SiGe microbolometer arrays are reported. An NETD of 100 mK at a time constant of 25 ms is achievable on 14×14 and 200×1 arrays at the system level. It is the result of joint studies targeted at 1/f noise decrease, as well as TCR and uniformity improvements together with the design optimization. Thanks to successful decrease of 1/f noise of SiGe, the arrays were moved from "1/f-noise limited" to "system limited", i.e. to the case of VOx arrays. The mechanical design of pixels was improved affording very precise tuning of the infrared quarter-wave resonant cavity. The resistance and TCR non-uniformity with σ/μ better than 0.2% combined with about 1% noise nonuniformity and 100% pixel operability are demonstrated. The first lots of arrays with 99.98% production pixel yield have already been characterized and the results are being reported.

KW - Infrared

KW - Linear array

KW - Microbolometer

KW - Poly-SiGe

KW - Readout

KW - Small focal plane array

KW - Thermal detector

KW - Thermal imaging

KW - Uncooled

UR - https://www.scopus.com/pages/publications/10744225492

U2 - 10.1117/12.487084

DO - 10.1117/12.487084

M3 - Conference article

AN - SCOPUS:10744225492

SN - 0277-786X

VL - 5074

SP - 446

EP - 457

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Infrared Technology and Applications XXIX

Y2 - 21 April 2003 through 25 April 2003

ER -

Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs

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