Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs

Vladimir N. Leonov; Ybe Creten; Piet De Moor; Bert Du Bois; Claus Goessens; Bob Grietens; Patrick Merken; Natalia A. Perova; Gerlinde Ruttens; Chris Van Hoof; Agnes Verbist; Jan Vermeiren

doi:10.1117/12.487084

Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs

Vladimir N. Leonov, Ybe Creten, Piet De Moor, Bert Du Bois, Claus Goessens, Bob Grietens, Patrick Merken, Natalia A. Perova, Gerlinde Ruttens, Chris Van Hoof, Agnes Verbist, Jan Vermeiren

Communication, Information, Systems and Sensors

Résultats de recherche: Contribution à un journal › Article de conférence › Revue par des pairs

Résumé

The state-of-the-art characteristics of polycrystalline SiGe microbolometer arrays are reported. An NETD of 100 mK at a time constant of 25 ms is achievable on 14×14 and 200×1 arrays at the system level. It is the result of joint studies targeted at 1/f noise decrease, as well as TCR and uniformity improvements together with the design optimization. Thanks to successful decrease of 1/f noise of SiGe, the arrays were moved from "1/f-noise limited" to "system limited", i.e. to the case of VO_x arrays. The mechanical design of pixels was improved affording very precise tuning of the infrared quarter-wave resonant cavity. The resistance and TCR non-uniformity with σ/μ better than 0.2% combined with about 1% noise nonuniformity and 100% pixel operability are demonstrated. The first lots of arrays with 99.98% production pixel yield have already been characterized and the results are being reported.

langue originale	Anglais
Pages (de - à)	446-457
Nombre de pages	12
journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5074
Les DOIs	https://doi.org/10.1117/12.487084
état	Publié - 2003
Evénement	Infrared Technology and Applications XXIX - Orlando, FL, États-Unis Durée: 21 avr. 2003 → 25 avr. 2003

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Leonov, V. N., Creten, Y., De Moor, P., Du Bois, B., Goessens, C., Grietens, B., Merken, P., Perova, N. A., Ruttens, G., Van Hoof, C., Verbist, A., & Vermeiren, J. (2003). Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs. Proceedings of SPIE - The International Society for Optical Engineering, 5074, 446-457. https://doi.org/10.1117/12.487084

@article{f5fa7dc226394798a0724049b45a8731,

title = "Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs",

abstract = "The state-of-the-art characteristics of polycrystalline SiGe microbolometer arrays are reported. An NETD of 100 mK at a time constant of 25 ms is achievable on 14×14 and 200×1 arrays at the system level. It is the result of joint studies targeted at 1/f noise decrease, as well as TCR and uniformity improvements together with the design optimization. Thanks to successful decrease of 1/f noise of SiGe, the arrays were moved from {"}1/f-noise limited{"} to {"}system limited{"}, i.e. to the case of VOx arrays. The mechanical design of pixels was improved affording very precise tuning of the infrared quarter-wave resonant cavity. The resistance and TCR non-uniformity with σ/μ better than 0.2% combined with about 1% noise nonuniformity and 100% pixel operability are demonstrated. The first lots of arrays with 99.98% production pixel yield have already been characterized and the results are being reported.",

keywords = "Infrared, Linear array, Microbolometer, Poly-SiGe, Readout, Small focal plane array, Thermal detector, Thermal imaging, Uncooled",

author = "Leonov, {Vladimir N.} and Ybe Creten and {De Moor}, Piet and {Du Bois}, Bert and Claus Goessens and Bob Grietens and Patrick Merken and Perova, {Natalia A.} and Gerlinde Ruttens and {Van Hoof}, Chris and Agnes Verbist and Jan Vermeiren",

year = "2003",

doi = "10.1117/12.487084",

language = "English",

volume = "5074",

pages = "446--457",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

note = "Infrared Technology and Applications XXIX ; Conference date: 21-04-2003 Through 25-04-2003",

}

Leonov, VN, Creten, Y, De Moor, P, Du Bois, B, Goessens, C, Grietens, B, Merken, P, Perova, NA, Ruttens, G, Van Hoof, C, Verbist, A & Vermeiren, J 2003, 'Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs', Proceedings of SPIE - The International Society for Optical Engineering, VOL. 5074, p. 446-457. https://doi.org/10.1117/12.487084

TY - JOUR

T1 - Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs

AU - Leonov, Vladimir N.

AU - Creten, Ybe

AU - De Moor, Piet

AU - Du Bois, Bert

AU - Goessens, Claus

AU - Grietens, Bob

AU - Merken, Patrick

AU - Perova, Natalia A.

AU - Ruttens, Gerlinde

AU - Van Hoof, Chris

AU - Verbist, Agnes

AU - Vermeiren, Jan

PY - 2003

Y1 - 2003

N2 - The state-of-the-art characteristics of polycrystalline SiGe microbolometer arrays are reported. An NETD of 100 mK at a time constant of 25 ms is achievable on 14×14 and 200×1 arrays at the system level. It is the result of joint studies targeted at 1/f noise decrease, as well as TCR and uniformity improvements together with the design optimization. Thanks to successful decrease of 1/f noise of SiGe, the arrays were moved from "1/f-noise limited" to "system limited", i.e. to the case of VOx arrays. The mechanical design of pixels was improved affording very precise tuning of the infrared quarter-wave resonant cavity. The resistance and TCR non-uniformity with σ/μ better than 0.2% combined with about 1% noise nonuniformity and 100% pixel operability are demonstrated. The first lots of arrays with 99.98% production pixel yield have already been characterized and the results are being reported.

AB - The state-of-the-art characteristics of polycrystalline SiGe microbolometer arrays are reported. An NETD of 100 mK at a time constant of 25 ms is achievable on 14×14 and 200×1 arrays at the system level. It is the result of joint studies targeted at 1/f noise decrease, as well as TCR and uniformity improvements together with the design optimization. Thanks to successful decrease of 1/f noise of SiGe, the arrays were moved from "1/f-noise limited" to "system limited", i.e. to the case of VOx arrays. The mechanical design of pixels was improved affording very precise tuning of the infrared quarter-wave resonant cavity. The resistance and TCR non-uniformity with σ/μ better than 0.2% combined with about 1% noise nonuniformity and 100% pixel operability are demonstrated. The first lots of arrays with 99.98% production pixel yield have already been characterized and the results are being reported.

KW - Infrared

KW - Linear array

KW - Microbolometer

KW - Poly-SiGe

KW - Readout

KW - Small focal plane array

KW - Thermal detector

KW - Thermal imaging

KW - Uncooled

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U2 - 10.1117/12.487084

DO - 10.1117/12.487084

M3 - Conference article

AN - SCOPUS:10744225492

SN - 0277-786X

VL - 5074

SP - 446

EP - 457

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Infrared Technology and Applications XXIX

Y2 - 21 April 2003 through 25 April 2003

ER -

Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs

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