Measurement of hydrogen plasma parameters of the combined ECR+RF discharge in the TOMAS facility

Yu Kovtun, T. Wauters, A. Goriaev, D. López-Rodríguez, K. Crombé, L. Dittrich, P. Petersson, S. Moon, S. Möller, J. Buermans, S. Brezinsek

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Résumé

The plasma electron density and temperature were measured in hydrogen electron-cyclotron resonance (ECR) plasma and combined ECR + radio-frequency (RF) discharges in the TOMAS facility. The results of ECR and combined ECR+RF discharges studies are compared. With an addition of RF, it is possible to vary the plasma parameters around the values provided by the ECR discharge. The propagation of slow (SW) and fast (FW) waves in hydrogen plasma is analyzed. Depending on the plasma density and the parallel component of the wave vector three cases are possible: SW propagation only, SW and FW simultaneous propagation, and FW propagation only.

langue originaleAnglais
Numéro d'article110001
journalAIP Conference Proceedings
Volume2984
Numéro de publication1
Les DOIs
étatPublié - 18 août 2023
Evénement24th Topical Conference on Radio-frequency Power in Plasmas - Annapolis, États-Unis
Durée: 26 sept. 202228 sept. 2022

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