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Ultralow-power hydrogen sensing with single palladium nanowires

  • P. Offermans
  • , H. D. Tong
  • , C. J.M. Van Rijn
  • , P. Merken
  • , S. H. Brongersma
  • , M. Crego-Calama
  • IMEC
  • Nanosens BV

Research output: Contribution to journalArticlepeer-review

152 Citations (Scopus)

Abstract

Palladium nanowires were fabricated on silicon substrates using conventional microfabrication techniques. Sensors based on such nanowires show a reversible response to hydrogen concentrations as low as 27 ppm with response times varying from 5 s (H2 concentrations >20%) to 30 s (H2 concentrations <100 ppm) at room temperature. The response times can be reduced by increasing the applied bias due to resistive heating. The noise spectrum of the nanowires shows a 1/f behavior, sufficiently low to enables the detection of hydrogen with an ultralow-power consumption. The influence of oxygen on the nanowire response was also investigated.

Original languageEnglish
Article number223110
JournalApplied Physics Letters
Volume94
Issue number22
DOIs
Publication statusPublished - 2009

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