Numerical analysis of zeptogram/Hz-level mass responsivity for in-plane resonant nano-electro-mechanical sensors
- F. A. Hassani
- , C. Cobianu
- , S. Armini
- , V. Petrescu
- , P. Merken
- , D. Tsamados
- , A. M. Ionescu
- , Y. Tsuchiya
- , H. Mizuta
- University of Southampton
- Sensors Laboratory Bucharest
- IMEC
- Ecole Polytechnique Federale de Lausanne
Research output: Contribution to journal › Article › peer-review
7
Citations
(Scopus)