Hybrid and CMOS-based infrared detectors

P. Merken, P. De Moor, J. John, L. Zimmermann, M. Gastal, S. C. Jain, C. Van Hoof

Research output: Contribution to journalConference articlepeer-review

Abstract

Infrared detector arrays can be divided in two distinct classes: hybrid and monolithic arrays. Most hybrid infrared sensors are based on photon detectors and nearly all monolithic infrared sensors make use of thermal detectors. Hybrid detectors involve flip-chip integration of the detector and the readout integrated circuit, necessitate cooling and therefore cause substantial system overhead. Monolithic arrays do not suffer from this system overhead and most notably the resistive microbolometer thermal detectors allow ambient operating temperature. Progress in hybrid III-V based (InGaAs, InAs, InAsSb) infrared detector arrays and towards polySiGe resistive microbolometer arrays will be discussed.

Original languageEnglish
Pages (from-to)I/-
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3975
Publication statusPublished - 2000
EventIWPSD-99: The 10th International Workshop on the Physics of Semiconductor Devices - New Delhi, India
Duration: 14 Dec 199918 Dec 1999

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