Flip-chip joined 8X8 array of bottom - emitting 850 nm light-emitting diodes for interconnect applications

P. Heremans, P. Merken, J. Genoe, R. Windisch, C. Van Hoof, G. Borghs

Research output: Contribution to journalConference articlepeer-review

Abstract

We present an array of GaAs-based light-emitting diodes emitting at 850 nm, which is designed to be flip-chip joined on carriers like a silicon CMOS circuit. The light-emitting diodes are grown by MBE. After processing of the array and flip-chip joining using Indium-bumps, the substrate of the LED array is removed completely. Individual light-emitting diodes reach an external quantum efficiency of 3.3% after the complete process.

Original languageEnglish
Pages (from-to)10-15
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3288
DOIs
Publication statusPublished - 1998
EventOptoelectronic Interconnects V - San Jose, CA, United States
Duration: 28 Jan 199829 Jan 1998

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