Abstract
To measure the local ion energy distribution functions for support of Ion Cyclotron Wall Conditioning (ICWC) application studies in the TOMAS device, a Semion Retarding Field Energy Analyzer (RFEA) by Impedans Ltd. has been installed in the sample load-lock system. The RFEA system has been commissioned in hydrogen Radio-Frequency (RF) plasmas. The first studies have been performed on the influence of the neutral hydrogen pressure, the input power, the magnetic field and the location on the average ion energy and ion flux density.
| Original language | English |
|---|---|
| Article number | 040007 |
| Journal | AIP Conference Proceedings |
| Volume | 2984 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 18 Aug 2023 |
| Event | 24th Topical Conference on Radio-frequency Power in Plasmas - Annapolis, United States Duration: 26 Sept 2022 → 28 Sept 2022 |