Double MZI Micro-Opto-Mechanical Pressure Sensors for increased sensitivity and pressure range
- V. Rochus
- , R. Jansen
- , B. Figeys
- , F. Verhaegen
- , R. Rosseel
- , P. Merken
- , S. Lenci
- , X. Rottenberg
- IMEC
- KU Leuven
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
11
Citations
(Scopus)