Double MZI Micro-Opto-Mechanical Pressure Sensors for increased sensitivity and pressure range

V. Rochus, R. Jansen, B. Figeys, F. Verhaegen, R. Rosseel, P. Merken, S. Lenci, X. Rottenberg

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper presents a novel integrated Micro-Opto-Mechanical Pressure Sensor that exhibits an excellent measurement precision in a large pressure range. The performance gain compared to classical designs is obtained by using a phase shift and by combining two Mach-Zendher Interferometers (MZls) on a single membrane: one with high sensitivity and one with large range. A balanced design and a power tap output allow to de-embed the noise generated by the laser and eases bandwidth requirements, allowing the use of an off-the-shelf laser diode. Using low-temperature deposited PECVD SiN as waveguide core, the new MZI Micro-Opto-Mechanical Pressure Sensor can be post-processed directly on CMOS imager/detector wafers.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages954-957
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - 26 Jul 2017
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 18 Jun 201722 Jun 2017

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Country/TerritoryTaiwan, Province of China
CityKaohsiung
Period18/06/1722/06/17

Keywords

  • Opto-mechanical sensor
  • Pressure sensor

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