Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs

Vladimir N. Leonov, Ybe Creten, Piet De Moor, Bert Du Bois, Claus Goessens, Bob Grietens, Patrick Merken, Natalia A. Perova, Gerlinde Ruttens, Chris Van Hoof, Agnes Verbist, Jan Vermeiren