Resonantly sustained bounded radiofrequency plasma in a spherical cavity

A. M. Messiaen, P. E. Vandenplas

Publikation: Beitrag in FachzeitschriftArtikelBegutachtung

Abstract

It is shown that the low-power linear behavior of a cavity (here a spherical one) partially filled with plasma plays a fundamental role in understanding the formation of an rf plasma inside it at higher power levels. The rf plasma is found to be sustained in one of the linear resonant states of the system. With moderate rf power (10-100 w), it is possible to sustain bounded plasmas in the cavity having densities far above the critical one. The value of the density depends, as is theoretically predicted, essentially on the frequency and only slightly on the power level of the exciting signal.

OriginalspracheEnglisch
Seiten (von - bis)30-33
Seitenumfang4
FachzeitschriftApplied Physics Letters
Jahrgang15
Ausgabenummer1
DOIs
PublikationsstatusVeröffentlicht - 1969

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