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Hybrid and CMOS-based infrared detectors

  • P. Merken
  • , P. De Moor
  • , J. John
  • , L. Zimmermann
  • , M. Gastal
  • , S. C. Jain
  • , C. Van Hoof
  • Interuniversitair Micro-Electronica Centrum vzw

Publikation: Beitrag in FachzeitschriftKonferenzartikelBegutachtung

1 Zitat (Scopus)

Abstract

Infrared detector arrays can be divided in two distinct classes: hybrid and monolithic arrays. Most hybrid infrared sensors are based on photon detectors and nearly all monolithic infrared sensors make use of thermal detectors. Hybrid detectors involve flip-chip integration of the detector and the readout integrated circuit, necessitate cooling and therefore cause substantial system overhead. Monolithic arrays do not suffer from this system overhead and most notably the resistive microbolometer thermal detectors allow ambient operating temperature. Progress in hybrid III-V based (InGaAs, InAs, InAsSb) infrared detector arrays and towards polySiGe resistive microbolometer arrays will be discussed.

OriginalspracheEnglisch
Seiten (von - bis)I/-
FachzeitschriftProceedings of SPIE - The International Society for Optical Engineering
Jahrgang3975
PublikationsstatusVeröffentlicht - 2000
VeranstaltungIWPSD-99: The 10th International Workshop on the Physics of Semiconductor Devices - New Delhi, India
Dauer: 14 Dez. 199918 Dez. 1999

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