Abstract
We present an array of GaAs-based light-emitting diodes emitting at 850 nm, which is designed to be flip-chip joined on carriers like a silicon CMOS circuit. The light-emitting diodes are grown by MBE. After processing of the array and flip-chip joining using Indium-bumps, the substrate of the LED array is removed completely. Individual light-emitting diodes reach an external quantum efficiency of 3.3% after the complete process.
Originalsprache | Englisch |
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Seiten (von - bis) | 10-15 |
Seitenumfang | 6 |
Fachzeitschrift | Proceedings of SPIE - The International Society for Optical Engineering |
Jahrgang | 3288 |
DOIs | |
Publikationsstatus | Veröffentlicht - 1998 |
Veranstaltung | Optoelectronic Interconnects V - San Jose, CA, USA/Vereinigte Staaten Dauer: 28 Jan. 1998 → 29 Jan. 1998 |