TY - GEN
T1 - Double MZI Micro-Opto-Mechanical Pressure Sensors for increased sensitivity and pressure range
AU - Rochus, V.
AU - Jansen, R.
AU - Figeys, B.
AU - Verhaegen, F.
AU - Rosseel, R.
AU - Merken, P.
AU - Lenci, S.
AU - Rottenberg, X.
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/7/26
Y1 - 2017/7/26
N2 - This paper presents a novel integrated Micro-Opto-Mechanical Pressure Sensor that exhibits an excellent measurement precision in a large pressure range. The performance gain compared to classical designs is obtained by using a phase shift and by combining two Mach-Zendher Interferometers (MZls) on a single membrane: one with high sensitivity and one with large range. A balanced design and a power tap output allow to de-embed the noise generated by the laser and eases bandwidth requirements, allowing the use of an off-the-shelf laser diode. Using low-temperature deposited PECVD SiN as waveguide core, the new MZI Micro-Opto-Mechanical Pressure Sensor can be post-processed directly on CMOS imager/detector wafers.
AB - This paper presents a novel integrated Micro-Opto-Mechanical Pressure Sensor that exhibits an excellent measurement precision in a large pressure range. The performance gain compared to classical designs is obtained by using a phase shift and by combining two Mach-Zendher Interferometers (MZls) on a single membrane: one with high sensitivity and one with large range. A balanced design and a power tap output allow to de-embed the noise generated by the laser and eases bandwidth requirements, allowing the use of an off-the-shelf laser diode. Using low-temperature deposited PECVD SiN as waveguide core, the new MZI Micro-Opto-Mechanical Pressure Sensor can be post-processed directly on CMOS imager/detector wafers.
KW - Opto-mechanical sensor
KW - Pressure sensor
UR - http://www.scopus.com/inward/record.url?scp=85029385444&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2017.7994208
DO - 10.1109/TRANSDUCERS.2017.7994208
M3 - Conference contribution
AN - SCOPUS:85029385444
T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 954
EP - 957
BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Y2 - 18 June 2017 through 22 June 2017
ER -